The main purpose of the room temperature manual probe station is to provide a test platform for the electrical parameter testing of semiconductor chips，External connection of different measuring instruments，With measuring instrument, it can detect the voltage, current, resistance and capacitance voltage characteristic curve of integrated circuit，For non-destructive testing of chips, wafers and devices at room temperature。

  PSM series room temperature manual probe station is a high-quality probe station that can perform a large number of non-destructive and standard electrical experiments on 2 inch, 4 inch, 6 inch, 8 inch wafers. It can complete the electrical characteristics measurement, parameter measurement, DC measurement of the device with different external test equipment。Scientific desktop design is an option for academic and experimental research。

特点
• Stable dual displacement adjustment system to adjust the displacement of the sample seat and probe arm。
• The sample holder can hold 8-inch wafer samples and is secured by controlled gas adsorption using porous partitions。
• Move the slide table under the sample base, which can realize the movement stroke of X-Y axis ±100mm, making sample testing and sample changing more convenient。The sliding table is fixed by magnetic adsorption。
• 6 probe arms can be mounted。
• The probe arm adopts magnet adsorption, can be moved arbitrarily, and can be fine-tuned in three dimensions, easy operation, precise needle insertion, the probe of the four probe arms can be inserted into any position of the sample。
• The probe arm adopts three coaxial cables and three coaxial connectors, and the leakage current is small, within 100fA。
• CCD magnification is 180 times, working distance is 100mm。

Model classification:

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