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HX12N series semi-automatic probe station

HX12N series semi-automatic probe station

The HX12N series semi-automatic probe station is equipped with a high-precision linear motor slide module, and the stroke meets the test of 8-inch and 12-inch chips。High positioning accuracy,Fast reaction speed and long service life,The sliding table is also equipped with a high-precision grating feedback system,The reliability of the running accuracy is guaranteed,And this module is the company's self-developed products,The finished product quality and production cycle of the module are guaranteed,It provides fast and accurate hardware guarantee for the test of probe station。

HX12N series semi-automatic probe table product overview

The HX12N series semi-automatic probe station is equipped with a high-precision linear motor slide module, and the stroke meets the test of 8-inch and 12-inch chips。High positioning accuracy,Fast reaction speed and long service life,The sliding table is also equipped with a high-precision grating feedback system,The reliability of the running accuracy is guaranteed,And this module is the company's self-developed products,The finished product quality and production cycle of the module are guaranteed,It provides fast and accurate hardware guarantee for the test of probe station。


Software function introduction
• Can test wafer, test range is optional, support interlace sampling and ring test, MAP map can be edited test;
• Support bad point retest;
• With offline and synchronous functions;
• With contact buffer function, stable needle marks;
• Operation accuracy compensation function to ensure the stability of the test;
• Test yield, total, speed display;
• CCD image automatic alignment and positioning;
• The equipment has a certain anti-interference ability, support high and low temperature test, stable operation;
• Multi-bin classification test, test data can be stored, can be exported, compatible with the format of post-channel devices, with data statistical analysis function;
• Operator, administrator, system manufacturer rights management functions

HX12N series semi-automatic probe table technical parameters

Parameters and indicators:

Performance name
Technical index
Diameter can be measured
8″、12″
XY table
结构
Linear motor
行程
230mm × 220mm, resolution: 1μm
速度
> 200mm/s
Positioning accuracy
≤±2μm
Bearing table
z-stroke
10mm, resolution: 1μm
Z-station accuracy
≤±1μm
z-resolution
≤±0.5μm
θ adjustment range
±25°
Theta resolution
0.006°
Microscope/video display system
Binocular stereo microscope/Optional triocular microscope and CCD real-time video display device
Temperature control range
-45℃~150 ℃
Temperature setting resolution
0.1 ℃
Temperature uniformity
-45°C 至 +150°C < ±1 °C,>150 °C < ±1 %

Optional accessories