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HX50N series semi-automatic probe station

HX50N series semi-automatic probe station

The HX50N series semi-automatic probe station is suitable for 4-inch and 5-inch wafers,Inclusion diode,triode,Measurement of MOSFET tube and vertical structure chip,Especially suitable for warped wafers and high voltage chip testing,Optional multi-pin test function,It can realize the requirements of multiple measurement at the same time,Increase the testing capacity of the machine。

HX50N series semi-automatic probe table product overview

  The HX50N series semi-automatic probe station is suitable for 4-inch and 5-inch wafers,Inclusion diode,triode,Measurement of MOSFET tube and vertical structure chip,Especially suitable for warped wafers and high voltage chip testing,Optional multi-pin test function,It can realize the requirements of multiple measurement at the same time,Increase the testing capacity of the machine。


Software function description:
1.Can test wafer, test range is optional, support interlace sampling and ring test, MAP map can be edited test;
2.Support bad point retest;
3.With offline and synchronous functions;
4.With contact buffer function, needle mark stability;
5.Operation accuracy compensation function to ensure the stability of the test;
6.Test yield, total, speed display;
7.CCD image automatic alignment and positioning;
8.The equipment has certain anti-interference ability, supports high and low temperature test, and runs stably.
9.Multi-bin classification test, test data can be stored, can be exported, compatible with the format of back-end devices, with data statistical analysis function;
10.Operator, administrator, system manufacturer rights management function;

HX50N series semi-automatic probe table technical parameters

Parameters and indicators:

Performance name
Technical index
Wafer size can be tested
4寸、5寸
Table travel
140mm×150mm
Control accuracy
≤0.001mm
Full precision
≤±0.05mm/140mm
z-stroke
≤5mm (adjustable)
Adjustable range in θ direction
±15°
Support high voltage testing≥2000V
Vacuum degree
>-0.08MP
Number of transfer wafers
25片
电源
AC220V 50Hz,1KW

Optional accessories