Low temperature probe station plays a vital role in scientific research and technology development。It can perform a variety of non-destructive physical and electrical properties tests on samples at low temperatures, helping researchers to deeply understand the various physical and electrical properties of materials or devices, so as to provide important data support for the development and application of new materials。

  The PSM-65K cryogenic probe is an economical and compact closed cycle cryogenic probe，Its compact and low vibration design，It can provide a < 65K-350K high and low temperature vacuum test environment for the electrical parameter test of semiconductor chips，Through the external connection of different electrical measuring instruments，Can complete material/device IV, CV, optical and microwave parameters detection，Enables non-destructive electrical testing of chips, wafers and devices in low temperature vacuum environments。

System features:

• Small low vibration closed cycle refrigeration, no need to consume liquid helium, temperature 65K。
• Vibration less than 1μm。
• Wide test temperature range, support 65K-350K continuous temperature change。
• Low power consumption, input power 320W。
• The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing different components on the sample to be switched for testing without destroying the vacuum。
• Unique probe arm X-Y-Z-R four-dimensional adjustment for 4-inch sample testing。
• The probe arm adopts a triaxial connector with good leakage performance and measured leakage current less than 100fA@1V@65K-350K。
• The vacuum chamber is made of aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of the test。

Parameters and indicators：