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HXJ5N0 series automatic probe station

HXJ5N0 series automatic probe station

HXJ5N0 series automatic probe 4 inch, 5 inch wafer, including diode, transistor, MOSFET tube, photoelectric device, sensor and vertical structure chip measurement, optional multi-pin test function, can realize the requirements of multiple simultaneous measurement, improve the testing capacity of the machine。

HXJ5N0 series automatic probe table product overview

  HXJ5N0 series automatic probe 4 inch, 5 inch wafer, including diode, transistor, MOSFET tube, photoelectric device, sensor and vertical structure chip measurement, optional multi-pin test function, can realize the requirements of multiple simultaneous measurement, improve the testing capacity of the machine。

Software function description:
1.Can test wafer, test range is optional, support interlace sampling and ring test, MAP map can be edited test;
2.Support bad point retest;
3.With offline and synchronous functions;
4.With contact buffer function, needle mark stability;
5.Operation accuracy compensation function to ensure the stability of the test;
6.Test yield, total, speed display;
7.CCD image automatic alignment and positioning;
8.The equipment has certain anti-interference ability, supports high and low temperature test, and runs stably.
9.Multi-bin classification test, test data can be stored, can be exported, compatible with the format of back-end devices, with data statistical analysis function;
10.Operator, administrator, system manufacturer rights management function;


HXJ5N0 series automatic probe table technical parameters

Parameters and indicators:

性能
技术
Wafer size can be tested
4寸、5寸
Table travel
140mm×150mm
Control accuracy
≤0.001mm
Full precision
≤±0.05mm/160mm
z-stroke
≤5mm (adjustable)
Adjustable range in θ direction
±15°
Support high voltage testing≥2000V
Transfer boat
Twin boat
Vacuum degree
>-0.08MP
电源
AC220V 50Hz,1KW

Optional accessories